Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate
2006-06-27
2006-06-27
Nhu, David (Department: 2818)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
Insulated gate formation
C438S474000, C438S475000, C438S785000
Reexamination Certificate
active
07067409
ABSTRACT:
A method of manufacturing a semiconductor device contact including forming an insulating layer over a substrate and forming an agglutinating layer over the insulating layer. The agglutinating layer is then exposed to a plasma treatment. A barrier layer is formed over the plasma-treated agglutinating layer, and a conductive layer is formed over the barrier layer.
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Chou Yu Hua
Luo Tzo Hung
Tsai Jian Shin
Tseng Chi Chan
Yang Jong Chen
Haynes and Boone LLP
Nhu David
Taiwan Semiconductor Manufacturing Company , Ltd.
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