Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate
2005-03-09
2009-06-02
Olsen, Allan (Department: 1792)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With measuring, sensing, detection or process control means
C438S690000, C257SE21300
Reexamination Certificate
active
07540935
ABSTRACT:
A method of etching a conductive layer includes converting at least a portion of the conductive layer and etching the conductive layer to substantially remove the converted portion of the conductive layer and thereby expose a remaining surface. The remaining surface has an average surface roughness of less than about 10 nm. A system for etching a conductive layer is also disclosed.
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Written Opinion of the International Search Authority (Oct. 22, 2007) (8 pages).
Bailey III Andrew D.
Howald Arthur M.
Kim Yun-sang
Yoon Hyungsuk Alexander
Lam Research Corporation
Martine & Penilla & Gencarella LLP
Olsen Allan
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