Plasma etching method

Details Plasma etching method Plasma etching method

1997-09-23

2000-12-26

Cain, Edward J.

Etching a substrate: processes

Gas phase etching of substrate

Application of energy to the gaseous etchant or to the...

216 74, 438710, 438720, B44C 122

Patent

active

061653756

ABSTRACT:
The present invention relates to a method of plasma etching and a method of operating a plasma etching apparatus.

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