Fluid sprinkling – spraying – and diffusing – Unitary plural outlet means – Arranged in plural groups or rows
Patent
1998-02-13
2000-04-18
Morris, Lesley D.
Fluid sprinkling, spraying, and diffusing
Unitary plural outlet means
Arranged in plural groups or rows
239560, 239561, B05B 114
Patent
active
060505060
ABSTRACT:
A showerhead used for dispensing gas over a wafer in chemical vapor deposition (CVD), especially for CVD of metals. The patterns of holes is tailored to compensate for thermal and other effects, in particular by increasing the density of holes toward the periphery of the wafer in three or more zones. Such a variable pattern is particularly useful for liquid precursors that are atomized in a carrier gas, in which case a second perforated plate in back of the showerhead face can be eliminated, thereby reducing the flow impedance and the required pressure of the liquid-entrained gas, which tends to deposit out at higher pressures. The reduce flow impedance is particularly useful for CVD of copper.
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Bhan Mohan K.
Chen Ling
Guo Xin Sheng
Koai Keith
Zheng Bo
Applied Materials Inc.
Guenzer Charles S.
Morris Lesley D.
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