4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Xin Sheng Guo

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Chemical vapor deposition hardware and process

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Chemical vapor deposition of copper using profiled...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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Cleaning of a PVD chamber containing a collimator

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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CVD processing chamber

Compositions – Fire-extinguishing – Foam-stabilizant or colloid-stabilizant containing
Patent

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Inductively coupled plasma processing chamber

Coating apparatus – Gas or vapor deposition
Patent

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Profile ID: LFUS-PAI-P-881402

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