4. Coating processes
  5. Coating by vapor, gas, or smoke

Keith Koai

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Chemical vapor deposition of copper using profiled...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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Pattern of apertures in a showerhead for chemical vapor depositi

Fluid sprinkling – spraying – and diffusing – Unitary plural outlet means – Arranged in plural groups or rows
Patent

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Processing chamber and method for confining plasma

Coating processes – Coating by vapor – gas – or smoke
Patent

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Reactor useful for chemical vapor deposition of titanium nitride

Coating apparatus – Gas or vapor deposition
Patent

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Profile ID: LFUS-PAI-P-448078

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