Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Inventor
active
Charged-particle beam optical apparatus for the reduction imagin
Electron-optical system with variable-shaped beam for generating
High current electron source
Method and device for determining the focal length of a long foc
Method and device for setting and correcting errors of an electr
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Profile ID: LFUS-PAI-P-368410