Objective with pupil obscuration

Details Objective with pupil obscuration Objective with pupil obscuration

2005-05-17

2005-05-17

Nguyen, Thong Q (Department: 2872)

Optical: systems and elements

Compound lens system

With curved reflective imaging element

C359S359000, C359S859000, C355S071000

Reexamination Certificate

active

06894834

ABSTRACT:
An objective is configured with a first partial objective and a second partial objective. The first partial objective, which projects a first field plane onto an intermediate image, has a first, convex mirror and a second, concave mirror. The second partial objective, which projects the intermediate image onto a second field plane, has a third and a fourth mirror, both concave. All of the four mirrors have central mirror apertures. The axial distance between the first and second mirrors is in a ratio between 0.95 and 1.05 relative to the distance between the second mirror and the intermediate image. The axial distance ZM3-IMbetween the third mirror and the second field plane conforms to the relationship0.03·DuM3+5.0⁢ ⁢mm<ZM3-IM<0.25·DuM3tan⁡(arcsin⁡(NA)).NA represents the numerical aperture NA in the second field plane, and DuM3represents the diameter of the third mirror. The objective furthermore has a Petzval radius with an absolute value larger than the distance between the first and second field planes.

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