Fluid handling – Systems – Dividing into parallel flow paths with recombining
Reexamination Certificate
2005-04-26
2008-09-30
Hepperle, Stephen M (Department: 3753)
Fluid handling
Systems
Dividing into parallel flow paths with recombining
C251S117000, C251S305000
Reexamination Certificate
active
07428915
ABSTRACT:
A valve system having high maximum gas flow rate and fine control of gas flow rate, includes a valve housing for blocking gas flow through a gas flow path, a large area opening through said housing having a first arcuate side wall and a small area opening through said housing having a second arcuate side wall, and respective large area and small area rotatable valve flaps in said large area and small area openings, respectively, and having arcuate edges congruent with said first and second arcuate side walls, respectively and defining therebetween respective first and second valve gaps. The first and second valve gaps are sufficiently small to block flow of a gas on one side of said valve housing up to a predetermined pressure limit, thereby obviating any need for O-rings.
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Al-Bayati Amir
Collins Kenneth S.
Gallo Biagio
Hanawa Hiroji
Nguyen Andrew
Applied Materials Inc.
Hepperle Stephen M
Law Office of Robert M. Wallace
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