Neutral particle beam processing apparatus

Details Neutral particle beam processing apparatus Neutral particle beam processing apparatus

2005-02-22

2005-02-22

Wells, Nikita (Department: 2881)

Radiant energy

Electrically neutral molecular or atomic beam devices and...

C250S42300F, C313S359100, C313S362100, C313S363100, C315S111210, C315S111310, C156S345390

Reexamination Certificate

active

06858838

ABSTRACT:
A neutral particle beam processing apparatus comprises a plasma generator for generating positive ions and/or negative ions in a plasma, a pair of electrodes (5, 6) involving the plasma generated by the plasma generator therebetween, and a power supply (102) for applying a voltage between the pair of electrodes (5, 6). The pair of electrodes (5, 6) accelerate the positive ions and/or the negative ions generated by the plasma generator. The positive ions and/or the negative ions are neutralized and converted into neutral particles while being drifted in the plasma between the pair of electrodes (5, 6) toward a workpiece (X). The accelerated neutral particles pass through one of the electrodes (6) and are applied to the workpiece (X).

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