4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Kazuo Yamauchi

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Analytical device with temperature control system

Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate

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Beam processing apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam source and beam processing apparatus

Radiant energy – Electrically neutral molecular or atomic beam devices and...
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Beam source and beam processing apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Etching method and apparatus

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Profile ID: LFUS-PAI-P-1269634

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