Neutral particle beam processing apparatus

Details Neutral particle beam processing apparatus Neutral particle beam processing apparatus

2005-03-01

2005-03-01

Font, Frank G. (Department: 2883)

Radiant energy

Electrically neutral molecular or atomic beam devices and...

C250S492200, C250S492220, C250S492230, C250S492300

Reexamination Certificate

active

06861642

ABSTRACT:
A neutral particle beam processing apparatus comprises a workpiece holder (20) for holding a workpiece (X), a plasma generator for generating a plasma in a vacuum chamber (3), an orifice electrode (5) disposed between the workpiece holder (20) and the plasma generator, and a grid electrode (4) disposed upstream of the orifice electrode (5) in the vacuum chamber (3). The orifice electrode (5) has orifices (5a) defined therein. The neutral particle beam processing apparatus further comprises a voltage applying unit for applying a voltage between the orifice electrode (5) and the grid electrode (4) via a dielectric (5b) to extract positive ions from the plasma generated by the plasma generator and pass the extracted positive ions through the orifices (5a) in the orifice electrode (5).

REFERENCES:
patent: 5284544 (1994-02-01), Mizutani et al.
patent: 6291940 (2001-09-01), Scholte Van Mast
patent: 0 531 949 (1993-03-01), None
patent: 0 790 757 (1997-08-01), None

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