Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1997-09-05
2000-09-05
Everhart, Caridad
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438637, 438633, 438945, H01L 2144
Patent
active
061142352
ABSTRACT:
A multipurpose cap layer serves as a bottom anti-reflective coating (BARC) during the formation of a resist mask, a hardmask during subsequent etching processes, a hardened surface during subsequent deposition and planarization processes, and optionally as a diffusion barrier to mobile ions from subsequently deposited materials.
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Chan Darin A.
Chen Susan H.
En William G.
Foote David K.
Lee Raymond T.
Advanced Micro Devices , Inc.
Everhart Caridad
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