Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Reexamination Certificate
2005-08-02
2008-10-21
Verbitsky, Gail (Department: 2855)
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
C374S124000, C374S129000, C250S338100, C356S043000
Reexamination Certificate
active
07438468
ABSTRACT:
A thermal processing system includes a source of laser radiation emitting at a laser wavelength, beam projection optics disposed between the reflective surface and a substrate support capable of holding a substrate to be processed, a pyrometer responsive to a pyrometer wavelength, and a wavelength responsive optical element having a first optical path for light in a first wavelength range including the laser wavelength, the first optical path being between the source of laser radiation and the beam projection optics, and a second optical path for light in a second wavelength range including the pyrometer wavelength, the second optical path being between the beam projection optics and the pyrometer. The system can further include a pyrometer wavelength blocking filter between the source of laser radiation and the wavelength responsive optical element.
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Adams Bruce E.
Hunter Aaron M.
Jennings Dean
Mayur Abhilash J.
Parihar Vijay
Applied Materials Inc.
Law Office of Robert M. Wallace
Verbitsky Gail
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