Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate
2005-06-07
2005-06-07
Wilson, Gregory (Department: 3749)
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
C432S005000, C432S253000, C392S418000
Reexamination Certificate
active
06902395
ABSTRACT:
A pedestal for use in a high temperature vertical furnace for the processing of semiconductor wafers provides a closure and heat insulation for the lower end of the furnace and is a wafer boat support. The pedestal, comprising quartz-enveloped insulation material, supports a wafer boat at a boat support level and is provided with an upper section disposed above the boat support level. The upper section comprises enveloped insulating material. The envelope of the upper section is also formed of quartz and the insulating material in the upper section has a lower thermal conductance than the insulating material in a lower quartz enveloped section.
REFERENCES:
patent: 5252062 (1993-10-01), Groves et al.
patent: 5308955 (1994-05-01), Watanabe
patent: 5329095 (1994-07-01), Okase
patent: 5601428 (1997-02-01), Okoshi et al.
patent: 5662470 (1997-09-01), Huussen et al.
patent: 5755570 (1998-05-01), Shinde et al.
patent: 5846073 (1998-12-01), Weaver
patent: 6191388 (2001-02-01), Cleaver et al.
patent: 6563686 (2003-05-01), Tsai et al.
Huussen Frank
Landsmeer Timothy Robert
Oosterlaken Theodorus Gerardus Maria
Terhorst Herbert
ASM International N.V.
Knobbe Martens Olson & Bear LLP
Wilson Gregory
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