4. Heating
  5. Heating apparatus element having protective cooling structure
  6. Wall, floor or roof element

Theodorus Gerardus Maria Oosterlaken

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Apparatus for transferring wafer and ring

Material or article handling – Chamber of a type utilized for a heating function and... – Including driven device and/or inclined flow path to carry...
Reexamination Certificate

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Method and apparatus for purging seals in a thermal reactor

Heating – Work feeding – agitating – discharging or conveying... – Having closure or seal for work feeder's entrance passage
Reexamination Certificate

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Method and device for transferring wafers

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Method for cooling a furnace, and furnace provided with a...

Heating – Heating apparatus element having protective cooling structure – Wall – floor or roof element
Reexamination Certificate

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Method for the chemical treatment of a semiconductor substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Profile ID: LFUS-PAI-P-2121122

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