4. Heating
  5. Work feeding, agitating, discharging or conveying...
  6. Removable furnace bottom section or kiln cart

Frank Huussen

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Apparatus for supporting a semiconductor wafer during...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Hybrid cascade model-based predictive control system

Data processing: generic control systems or specific application – Specific application – apparatus or process – Specific application of temperature responsive control system
Reexamination Certificate

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Method and apparatus for processing semiconductor substrates

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Method and apparatus for purging seals in a thermal reactor

Heating – Work feeding – agitating – discharging or conveying... – Having closure or seal for work feeder's entrance passage
Reexamination Certificate

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Method and apparatus for supporting a semiconductor wafer...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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Profile ID: LFUS-PAI-P-506863

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