4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Plural coatings applied by vapor, gas, or smoke

Herbert Terhorst

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Apparatus for treating a wafer

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Atomic layer deposition apparatus

Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke
Reexamination Certificate

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Method and apparatus for purging seals in a thermal reactor

Heating – Work feeding – agitating – discharging or conveying... – Having closure or seal for work feeder's entrance passage
Reexamination Certificate

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Method and apparatus for the treatment of substrates

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Method for the heat treatment of substrates

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
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Profile ID: LFUS-PAI-P-2325375

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