Abrading – Machine – Rotary tool
Reexamination Certificate
2005-01-26
2011-11-29
Eley, Timothy V (Department: 3724)
Abrading
Machine
Rotary tool
C451S290000, C451S527000, C451S533000, C451S540000
Reexamination Certificate
active
08066552
ABSTRACT:
A polishing pad has a polishing layer and a backing layer secured to the polishing layer. The polishing layer has a polishing surface, a first thickness, a first compressibility, and a hardness between about 40 to 80 Shore D. The backing layer has a second thickness and has a second compressibility greater than the first compressibility. The first thickness, first compressibility, second thickness and second compressibility are such that the polishing surface deflects more than the thickness non-uniformity of the polishing layer under an applied pressure of 1.5 psi or less.
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Chang Shou-Sung
Duboust Alain
Lu Wei
Manens Antoine P.
Moon Yong-sik
Applied Materials Inc.
Eley Timothy V
Fish & Richardson P.C.
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