Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-01-18
2005-01-18
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
Reexamination Certificate
active
06844550
ABSTRACT:
A multi-column electron beam inspection system is disclosed herein. The system is designed for electron beam inspection of semiconductor wafers with throughput high enough for in-line use. The system includes field emission electron sources, electrostatic electron optical columns, a wafer stage with six degrees of freedom of movement, and image storage and processing systems capable of handling multiple simultaneous image data streams. Each electron optical column is enhanced with an electron gun with redundant field emission sources, a voltage contrast plate to allow voltage contrast imaging of wafers, and an electron optical design for high efficiency secondary electron collection.
REFERENCES:
patent: 4390789 (1983-06-01), Smith et al.
patent: 4430571 (1984-02-01), Smith et al.
patent: 4661709 (1987-04-01), Walker et al.
patent: 4694178 (1987-09-01), Harte
patent: 4724328 (1988-02-01), Lischke
patent: 4742234 (1988-05-01), Feldman et al.
patent: 4902898 (1990-02-01), Jones et al.
patent: 4996441 (1991-02-01), Lischke
patent: 5363021 (1994-11-01), MacDonald
patent: 5384463 (1995-01-01), Honjo et al.
patent: 5430292 (1995-07-01), Honjo et al.
patent: 5502306 (1996-03-01), Meisburger et al.
patent: 5557105 (1996-09-01), Honjo et al.
patent: 5578821 (1996-11-01), Meisberger et al.
patent: 5892224 (1999-04-01), Nakasuji
patent: 5981962 (1999-11-01), Groves et al.
patent: 6023060 (2000-02-01), Chang et al.
patent: 6157039 (2000-12-01), Mankos
patent: 6252412 (2001-06-01), Talbot et al.
patent: 6465783 (2002-10-01), Nakasuji
patent: 6509750 (2003-01-01), Talbot et al.
patent: 6734428 (2004-05-01), Parker et al.
patent: 6738506 (2004-05-01), Miller et al.
patent: 6750455 (2004-06-01), Lo et al.
patent: 20010032939 (2001-10-01), Gerlach et al.
patent: WO 9848443 (1998-10-01), None
Brodie Alan D.
Parker N. William
Tsai Frank Ching-Feng
Yin Edward M.
Jaffer David
Lee John R.
Multibeam Systems, Inc.
Pillsbury & Winthrop LLP
Smith II Johnnie L
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