4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means

Edward M. Yin

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Detector optics for electron beam inspection system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Electron optics for multi-beam electron beam lithography tool

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Multi-beam multi-column electron beam inspection system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Multi-beam multi-column electron beam inspection system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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