4. Electrical generator or motor structure
  5. Dynamoelectric
  6. Reciprocating

Multibeam Systems, Inc.

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Apparatus and method for inspection and testing of flat...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Detector optics for charged particle beam inspection system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Detector optics for multiple electron beam test system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Dual detector optics for simultaneous collection of...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Electron optics for multi-beam electron beam lithography tool

Radiant energy – With charged particle beam deflection or focussing – With target means
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