4. Pumps
  5. Motor driven
  6. Electric or magnetic motor

Charles Grosjean

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Check-valved silicon diaphragm pump and method of...

Pumps – Motor driven – Electric or magnetic motor
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Ground strap for suppressing stiction during MEMS fabrication

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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MEMS valve

Valves and valve actuation – Heat or buoyancy motor actuated
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Micromachined parylene membrane valve and pump

Power plants – Fluid within expansible chamber heated or cooled – Having means within the working chamber to effect the...
Reexamination Certificate

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Micromachined parylene membrane valve and pump

Power plants – Fluid within expansible chamber heated or cooled – Having means within the working chamber to effect the...
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Profile ID: LFUS-PAI-P-2447732

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