4. Fluid handling
  5. Line condition change responsive valves
  6. Direct response valves

Xuan-Qi Wang

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Check-valved silicon diaphragm pump and method of...

Pumps – Motor driven – Electric or magnetic motor
Reexamination Certificate

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IC-compatible parylene MEMS technology and its application...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Micromachined parylene membrane valve and pump

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Micromachined parylene membrane valve and pump

Power plants – Fluid within expansible chamber heated or cooled – Having means within the working chamber to effect the...
Reexamination Certificate

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Micromachined parylene membrane valve and pump

Power plants – Fluid within expansible chamber heated or cooled – Having means within the working chamber to effect the...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2038858

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