4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Benzion Sender

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Method and system for focusing a charged particle beam

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Methods of scanning an object that includes multiple regions...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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System and method for inspecting charged particle responsive...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3086387

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