Methods of forming zirconium aluminum oxide

Details Methods of forming zirconium aluminum oxide Methods of forming zirconium aluminum oxide

2006-11-13

2009-12-01

Lee, Hsien-ming (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S287000, C438S785000, C427S255310, C427S255280, C257SE29158

Reexamination Certificate

active

07625794

ABSTRACT:
A dielectric layer having atomic layer deposited zirconium aluminum oxide and a method of fabricating such a dielectric layer may produce a reliable dielectric layer having an equivalent oxide thickness thinner than attainable using SiO2. The zirconium aluminum oxide may be formed in an atomic layer deposition process that includes pulsing a zirconium-containing precursor onto a substrate and pulsing an aluminum-containing precursor.

REFERENCES:
patent: 4058430 (1977-11-01), Suntola et al.
patent: 4413022 (1983-11-01), Suntola et al.
patent: 5055319 (1991-10-01), Bunshah et al.
patent: 5439524 (1995-08-01), Cain et al.
patent: 5625233 (1997-04-01), Cabral, Jr. et al.
patent: 5840897 (1998-11-01), Kirlin et al.
patent: 5879459 (1999-03-01), Gadgil et al.
patent: 5916365 (1999-06-01), Sherman
patent: 5923056 (1999-07-01), Lee et al.
patent: 6010969 (2000-01-01), Vaartstra
patent: 6013553 (2000-01-01), Wallace et al.
patent: 6020024 (2000-02-01), Maiti et al.
patent: 6025225 (2000-02-01), Forbes et al.
patent: 6025627 (2000-02-01), Forbes et al.
patent: 6027961 (2000-02-01), Maiti et al.
patent: 6060755 (2000-05-01), Ma et al.
patent: 6063705 (2000-05-01), Vaartstra
patent: 6075691 (2000-06-01), Duenas et al.
patent: 6125062 (2000-09-01), Ahn et al.
patent: 6134175 (2000-10-01), Forbes et al.
patent: 6141238 (2000-10-01), Forbes et al.
patent: 6141260 (2000-10-01), Ahn et al.
patent: 6174809 (2001-01-01), Kang et al.
patent: 6191448 (2001-02-01), Forbes et al.
patent: 6191470 (2001-02-01), Forbes et al.
patent: 6200893 (2001-03-01), Sneh
patent: 6207589 (2001-03-01), Ma et al.
patent: 6217645 (2001-04-01), Vaartstra
patent: 6225237 (2001-05-01), Vaartstra
patent: 6249460 (2001-06-01), Forbes et al.
patent: 6273951 (2001-08-01), Vaartstra
patent: 6274937 (2001-08-01), Ahn et al.
patent: 6281042 (2001-08-01), Ahn et al.
patent: 6291866 (2001-09-01), Wallace et al.
patent: 6294813 (2001-09-01), Forbes et al.
patent: 6297103 (2001-10-01), Ahn et al.
patent: 6297539 (2001-10-01), Ma et al.
patent: 6313035 (2001-11-01), Sandhu et al.
patent: 6313518 (2001-11-01), Ahn et al.
patent: 6317357 (2001-11-01), Forbes
patent: 6331465 (2001-12-01), Forbes et al.
patent: 6337805 (2002-01-01), Forbes et al.
patent: 6350704 (2002-02-01), Ahn et al.
patent: 6368398 (2002-04-01), Vaartstra
patent: 6368518 (2002-04-01), Vaartstra
patent: 6381168 (2002-04-01), Forbes
patent: 6392257 (2002-05-01), Ramdani et al.
patent: 6395650 (2002-05-01), Callegari et al.
patent: 6404027 (2002-06-01), Hong et al.
patent: 6407435 (2002-06-01), Ma et al.
patent: 6418050 (2002-07-01), Forbes
patent: 6420230 (2002-07-01), Derderian et al.
patent: 6420279 (2002-07-01), Ono et al.
patent: 6429065 (2002-08-01), Forbes
patent: 6434041 (2002-08-01), Forbes et al.
patent: 6441417 (2002-08-01), Zhang et al.
patent: 6444592 (2002-09-01), Ballantine et al.
patent: 6445023 (2002-09-01), Vaartstra et al.
patent: 6448192 (2002-09-01), Kaushik
patent: 6451641 (2002-09-01), Halliyal et al.
patent: 6451662 (2002-09-01), Chudzik et al.
patent: 6451695 (2002-09-01), Sneh
patent: 6454912 (2002-09-01), Ahn et al.
patent: 6455717 (2002-09-01), Vaartstra
patent: 6456535 (2002-09-01), Forbes et al.
patent: 6465298 (2002-10-01), Forbes et al.
patent: 6465853 (2002-10-01), Hobbs et al.
patent: 6482740 (2002-11-01), Soininen et al.
patent: 6492233 (2002-12-01), Forbes et al.
patent: 6495436 (2002-12-01), Ahn et al.
patent: 6498065 (2002-12-01), Forbes et al.
patent: 6504214 (2003-01-01), Yu et al.
patent: 6509280 (2003-01-01), Choi
patent: 6514808 (2003-02-01), Samavedam
patent: 6514820 (2003-02-01), Ahn et al.
patent: 6514828 (2003-02-01), Ahn et al.
patent: 6527866 (2003-03-01), Matijasevic et al.
patent: 6528858 (2003-03-01), Yu et al.
patent: 6534357 (2003-03-01), Basceri
patent: 6534420 (2003-03-01), Ahn et al.
patent: 6537613 (2003-03-01), Senzaki et al.
patent: 6538330 (2003-03-01), Forbes
patent: 6541079 (2003-04-01), Bojarczuk, Jr. et al.
patent: 6541280 (2003-04-01), Kaushik et al.
patent: 6541353 (2003-04-01), Sandhu et al.
patent: 6542229 (2003-04-01), Kalal et al.
patent: 6544846 (2003-04-01), Ahn et al.
patent: 6544875 (2003-04-01), Wilk
patent: 6551893 (2003-04-01), Zheng et al.
patent: 6552383 (2003-04-01), Ahn et al.
patent: 6559014 (2003-05-01), Jeon
patent: 6559472 (2003-05-01), Sandhu et al.
patent: 6562491 (2003-05-01), Jeon
patent: 6566147 (2003-05-01), Basceri et al.
patent: 6566682 (2003-05-01), Forbes
patent: 6570248 (2003-05-01), Ahn et al.
patent: 6573199 (2003-06-01), Sandhu et al.
patent: 6586349 (2003-07-01), Jeon et al.
patent: 6586792 (2003-07-01), Ahn et al.
patent: 6586797 (2003-07-01), Forbes et al.
patent: 6596636 (2003-07-01), Sandhu et al.
patent: 6597037 (2003-07-01), Forbes et al.
patent: 6608378 (2003-08-01), Ahn et al.
patent: 6613656 (2003-09-01), Li
patent: 6613702 (2003-09-01), Sandhu et al.
patent: 6620670 (2003-09-01), Song et al.
patent: 6627260 (2003-09-01), Derderian et al.
patent: 6627503 (2003-09-01), Ma et al.
patent: 6632279 (2003-10-01), Ritala et al.
patent: 6639267 (2003-10-01), Eldridge
patent: 6642567 (2003-11-01), Marsh
patent: 6642573 (2003-11-01), Halliyal et al.
patent: 6645882 (2003-11-01), Halliyal et al.
patent: 6652924 (2003-11-01), Sherman
patent: 6656764 (2003-12-01), Wang et al.
patent: 6660660 (2003-12-01), Haukka et al.
patent: 6661058 (2003-12-01), Ahn et al.
patent: 6673701 (2004-01-01), Marsh et al.
patent: 6674138 (2004-01-01), Halliyal et al.
patent: 6682602 (2004-01-01), Vaartstra
patent: 6683005 (2004-01-01), Sandhu et al.
patent: 6683011 (2004-01-01), Smith et al.
patent: 6686212 (2004-02-01), Conley, Jr. et al.
patent: 6696332 (2004-02-01), Visokay et al.
patent: 6699745 (2004-03-01), Banerjee et al.
patent: 6709989 (2004-03-01), Ramdani et al.
patent: 6710538 (2004-03-01), Ahn et al.
patent: 6713846 (2004-03-01), Senzaki
patent: 6720216 (2004-04-01), Forbes
patent: 6720221 (2004-04-01), Ahn et al.
patent: 6730163 (2004-05-01), Vaartstra
patent: 6730164 (2004-05-01), Vaartstra et al.
patent: 6730575 (2004-05-01), Eldridge
patent: 6731531 (2004-05-01), Forbes et al.
patent: 6734480 (2004-05-01), Chung
patent: 6734510 (2004-05-01), Forbes et al.
patent: 6737740 (2004-05-01), Forbes et al.
patent: 6750066 (2004-06-01), Cheung et al.
patent: 6754108 (2004-06-01), Forbes
patent: 6756298 (2004-06-01), Ahn et al.
patent: 6760257 (2004-07-01), Huang et al.
patent: 6762114 (2004-07-01), Chambers
patent: 6767582 (2004-07-01), Elers
patent: 6767795 (2004-07-01), Ahn et al.
patent: 6770536 (2004-08-01), Wilk et al.
patent: 6770923 (2004-08-01), Nguyen et al.
patent: 6774050 (2004-08-01), Ahn et al.
patent: 6777353 (2004-08-01), Putkonen
patent: 6778441 (2004-08-01), Forbes et al.
patent: 6780704 (2004-08-01), Raaijmakers et al.
patent: 6784049 (2004-08-01), Vaartstra
patent: 6787370 (2004-09-01), Forbes
patent: 6787413 (2004-09-01), Ahn
patent: 6790791 (2004-09-01), Ahn et al.
patent: 6794255 (2004-09-01), Forbes et al.
patent: 6794284 (2004-09-01), Vaartstra
patent: 6794709 (2004-09-01), Ahn et al.
patent: 6800567 (2004-10-01), Cho
patent: 6803311 (2004-10-01), Choi
patent: 6803326 (2004-10-01), Ahn et al.
patent: 6804136 (2004-10-01), Forbes
patent: 6806211 (2004-10-01), Shinriki et al.
patent: 6808978 (2004-10-01), Kim
patent: 6812100 (2004-11-01), Ahn et al.
patent: 6812137 (2004-11-01), Forbes et al.
patent: 6828656 (2004-12-01), Forbes et al.
patent: 6831315 (2004-12-01), Raaijmakers et al.
patent: 6833285 (2004-12-01), Ahn et al.
patent: 6833308 (2004-12-01), Ahn et al.
patent: 6835111 (2004-12-01), Ahn et al.
patent: 6844203 (2005-01-01), Ahn et al.
patent: 6844260 (2005-01-01), Sarigiannis et al.
patent: 6844604 (2005-01-01), Lee et al.
patent: 6852167 (2005-02-01), Ahn
patent: 6852645 (2005-02-01), Colombo et al.
patent: 6858120 (2005-02-01), Ahn et al.
patent: 6858444 (2005-02-01), Ahn et al.
patent: 6858865 (2005-02-01), Ahn et al.
patent: 6863725 (2005-03-01), Vaartstra et al.
patent: 6884719 (2005-04-01), Chang et al.
patent: 6884739 (2005-04-01), Ahn et al.
patent: 6888739 (2005-05-01), Forbes
patent: 6890843 (2005-05-01), Forbes et al.
patent: 6893984 (2005-05

Affiliated with

Also associated with

Rating

Methods of forming zirconium aluminum oxide does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods of forming zirconium aluminum oxide, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of forming zirconium aluminum oxide will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4127133