Methods of forming integrated decoupling capacitors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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438250, 438381, H01L 218234

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active

058518681

ABSTRACT:
Methods of forming decoupling capacitors include the steps of forming an insulated first capacitor electrode on a first portion of a face of a semiconductor substrate containing a region of first conductivity type therein extending to the first portion of the face. A second capacitor electrode is formed on the insulated first capacitor electrode, opposite the region of first conductivity type. Inversion-layer charge source regions of second conductivity type are formed in the region of first conductivity type, so that second conductivity type charges carriers can be supplied to the first portion of the face when the first capacitor electrode is appropriately biased. A first capacitor contact is formed to electrically contact the insulated first capacitor electrode and a second capacitor contact is also formed to electrically connect the second capacitor electrode to the inversion-layer charge source regions.

REFERENCES:
patent: 4700457 (1987-10-01), Matsukawa
patent: 5350705 (1994-09-01), Brassington et al.
patent: 5439840 (1995-08-01), Jones, Jr. et al.
patent: 5472900 (1995-12-01), Vu et al.
patent: 5587333 (1996-12-01), Johansson et al.

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