Methods of fabricating passive element without planarizing

Details Methods of fabricating passive element without planarizing Methods of fabricating passive element without planarizing

2008-09-23

2008-09-23

Wilczewski, M. (Department: 2822)

Semiconductor device manufacturing: process

Making passive device

C438S384000, C438S393000

Reexamination Certificate

active

11427457

ABSTRACT:
Methods of fabricating a passive element and a semiconductor device including the passive element are disclosed including the use of a dummy passive element. A dummy passive element is a passive element or wire which is added to the chip layout to aid in planarization but is not used in the active circuit. One embodiment of the method includes forming the passive element and a dummy passive element adjacent to the passive element; forming a dielectric layer over the passive element and the dummy passive element, wherein the dielectric layer is substantially planar between the passive element and the dummy passive element; and forming in the dielectric layer an interconnect to the passive element through the dielectric layer and a dummy interconnect portion overlapping at least a portion of the dummy passive element. The methods eliminate the need for planarizing.

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