4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Seon-Mee Cho

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Apparatus for reducing plasma charge damage for plasma...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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CVD plasma assisted lower dielectric constant sicoh film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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CVD plasma assisted lower dielectric constant SICOH film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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CVD plasma assisted lower dielectric constant SICOH film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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In-situ dose monitoring using optical emission spectroscopy

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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