Method of wet etching of polyimide

Details Method of wet etching of polyimide Method of wet etching of polyimide

1992-01-16

1994-08-30

Rodee, Christopher

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430313, 430271, 430272, G03C 193

Patent

active

053427360

ABSTRACT:
A method of wet etching of polyimide comprising the steps of

REFERENCES:
patent: 4092442 (1978-05-01), Agnihotri et al.
patent: 4624740 (1986-11-01), Abrams et al.
patent: 5043248 (1991-08-01), Uekitz et al.

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