Method of reducing particulates in a plasma tool through steady

Details Method of reducing particulates in a plasma tool through steady Method of reducing particulates in a plasma tool through steady

1995-05-25

1996-08-06

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427444, 427569, 427575, H05H 102

Patent

active

055431844

ABSTRACT:
A method and apparatus for reducing particulates in a plasma tool using steady state flows includes a device, operatively coupled to a housing in which an object to be processed is positioned, for generating a plasma flow adjacent the object toward a pumping aperture. A pumping mechanism pumps a medium adjacent the object. The medium supports the plasma and entrains particulates in the plasma away from the object and out the pumping aperture. Magnetic fields, produced by multipole magnets forming a ring cusp, are preferably used to produce the plasma flow which is directed radially away from the object to be processed. In a second embodiment, an array of magnets which form a line cusp is provided to produce an opening through which plasma will flow.

REFERENCES:
patent: 4727293 (1988-02-01), Asmussen et al.
patent: 4891095 (1990-01-01), Ishida et al.
patent: 4977352 (1990-12-01), Williamson
patent: 4980896 (1990-12-01), Forsyth et al.
patent: 5021114 (1991-06-01), Saito et al.
patent: 5032202 (1991-07-01), Tsai et al.
patent: 5032205 (1991-07-01), Hereshkowitz et al.
patent: 5133825 (1992-07-01), Hakamata et al.
patent: 5178739 (1993-01-01), Barnes et al.
patent: 5203960 (1993-04-01), Dandl
patent: 5216329 (1993-06-01), Pelletier
patent: 5304277 (1994-04-01), Ohara et al.
patent: 5304279 (1994-04-01), Coultas et al.
patent: 5329205 (1994-07-01), Goebel et al.
patent: 5346579 (1994-09-01), Cook et al.
Michael S. Barnes, et al.; "Transport of Dust Particles in Glow-Discharge Plasma"; Physical Review Letters, vol. 68, No. 3, Jan. 20, 1992, pp. 313-316.
Sasaki, Japanese Laid-Open No. 2-17636, Patent Abstracts of Japan, Section E, Section No. 909, vol. 14, No. 161, p. 51 (Mar. 28, 1990).

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