Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Apparatus and method for sputtering ionized material in a plasma
Apparatus for depositing material into high aspect ratio holes
Apparatus for gettering of particles during plasma processing
Apparatus for improved power coupling through a workpiece in...
Apparatus for sputtering ionized material in a medium to...
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Profile ID: LFUS-PAI-P-692991