Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate
2011-06-28
2011-06-28
Philogene, Haissa (Department: 2821)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With measuring, sensing, detection or process control means
C156S345440, C156S345240, C156S345200, C315S111210
Reexamination Certificate
active
07967944
ABSTRACT:
A workpiece is processed in a plasma reactor chamber using stabilization RF power delivered into the chamber, by determining changes in load impedance from RF parameters sensed at an RF source or bias power generator and resolving the changes in load impedance into first and second components thereof, and changing the power level of the stabilization RF power as a function one of the components of changes in load impedance.
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Collins Kenneth S.
Hoffman Daniel J.
Miller Matthew L.
Ramaswamy Kartik
Shannon Steven C.
Applied Materials Inc.
Philogene Haissa
Wallace Robert M.
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