Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1995-06-02
1997-01-14
Fourson, George
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
134 12, 427569, B44C 122, C03C 1500, C23F 100, H01L 21306
Patent
active
055935419
ABSTRACT:
A metal structure, such as an apparatus used in plasma processing of substrates, is rendered resistant to corrosion by coating components exposed to the plasma with a coating of rhodium. The rhodium coating can be made by electroplating, and preferably has a thickness of at least about 10 microinches, and preferably from about 10 to about 100 microinches. A coating of nickel can be applied between the rhodium coating and the metal component.
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Chew Sandy M.
Wong Manus K.
Applied Materials Inc.
Dutton Brian K.
Einschlag Michael B.
Fourson George
Janah Ashok K.
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