Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate
2006-03-13
2009-10-27
Rose, Kiesha L (Department: 2891)
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
C257SE21019
Reexamination Certificate
active
07608549
ABSTRACT:
In one aspect, non-conformal layers are formed by variations of plasma enhanced atomic layer deposition, where one or more of pulse duration, separation, RF power on-time, reactant concentration, pressure and electrode spacing are varied from true self-saturating reactions to operate in a depletion-effect mode. Deposition thus takes place close to the substrate surface but is controlled to terminate after reaching a specified distance into openings (e.g., deep DRAM trenches, pores, etc.). Reactor configurations that are suited to such modulation include showerhead, in situ plasma reactors, particularly with adjustable electrode spacing. In another aspect, alternately and sequentially contacting a substrate, the substrate including openings, with at least two different reactants, wherein an under-saturated dose of at least one of the reactants has been predetermined and the under-saturated dose is provided uniformly across the substrate surface, deposits a film that less than fully covers surfaces of the openings, leading to depletion effects in less accessible regions on the substrate surface.
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Elers Kai-Erik
Maes Jan Willem
Marcus Steven
Räisänen Petri
Van Nooten Sebastian E.
Anya Igwe U
ASM America Inc.
Knobbe Martens Olson & Bear LLP
Rose Kiesha L
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