4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Pretreatment of coating supply or source outside of primary...

ASM America Inc.

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ALD of metal silicate films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Apparatus and method for growth of a thin film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Apparatus and method for growth of a thin film

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Apparatus and method for growth of a thin film

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Apparatus and methods for isolating chemical vapor reactions...

Coating apparatus – Gas or vapor deposition
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