4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Kai-Erik Elers

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Atomic layer deposition reactor

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Conformal lining layers for damascene metallization

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Controlled composition using plasma-enhanced atomic layer...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Deposition of transition metal carbides

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Deposition of transition metal carbides

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
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Profile ID: LFUS-PAI-P-2338604

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