Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2008-03-04
2008-03-04
Chen, Jack (Department: 2813)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S210000, C438S381000
Reexamination Certificate
active
10945147
ABSTRACT:
A method of simultaneously forming at least: one capacitor two resistors and one metal-oxide semiconductor. A first doped polysilicon layer/patterned interpoly oxide film/second doped polysilicon layer is formed over an exposed oxide structure. The patterned interpoly oxide forms a capacitor interpoly portion within a capacitor region and a second interpoly portion within a second resistor region. A second doped polysilicon layer is formed over the structure. The doped first and second polysilicon layers are patterned to form: a lower capacitor doped first polysilicon portion and an overlying upper capacitor second doped polysilicon portion; a lower first resistor first polysilicon portion and an upper, overlying first resistor second polysilicon portion; a lower second resistor first polysilicon portion; and a lower metal-oxide semiconductor first polysilicon portion and an overlying metal-oxide semiconductor second polysilicon portion.
REFERENCES:
patent: 5434098 (1995-07-01), Chang
patent: 5618749 (1997-04-01), Takahashi et al.
patent: 5656524 (1997-08-01), Eklund et al.
patent: 6246084 (2001-06-01), Kim
patent: 6806136 (2004-10-01), Hsu
Ackerman Stephen B.
Chen Jack
EPISIL Technologies, Inc.
Saile Ackerman LLC
Stanton Stephen G.
LandOfFree
Method of forming a semiconductor device having a capacitor... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of forming a semiconductor device having a capacitor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming a semiconductor device having a capacitor... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3912265