Method of fabricating semiconductor device with cell...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S242000, C438S243000, C257S296000, C257S306000, C257S307000, C257S308000, C257S311000, C257S330000, C257S332000, C257SE27091, C257SE27084

Reexamination Certificate

active

08053307

ABSTRACT:
A semiconductor device may include a substrate having a cell active region. A cell gate electrode may be formed in the cell active region. A cell gate capping layer may be formed on the cell gate electrode. At least two cell epitaxial layers may be formed on the cell active region. One of the at least two cell epitaxial layers may extend to one end of the cell gate capping layer and another one of the at least two cell epitaxial layers may extend to an opposite end of the cell gate capping layer. Cell impurity regions may be disposed in the cell active region. The cell impurity regions may correspond to a respective one of the at least two cell epitaxial layers.

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patent: 6479358 (2002-11-01), Yu
patent: 6498071 (2002-12-01), Hijzen
patent: 6638826 (2003-10-01), Zeng
patent: 6770535 (2004-08-01), Yamada et al.
patent: 2004/0043595 (2004-03-01), Lee et al.
patent: 2004/0169221 (2004-09-01), Ko et al.
patent: 1020010093012 (2001-10-01), None

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