Method of engaging the scanning probe of a scanning probe micros

Details Method of engaging the scanning probe of a scanning probe micros Method of engaging the scanning probe of a scanning probe micros

1995-03-24

1997-03-25

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250306, 73105, H01J 3728

Patent

active

056147120

ABSTRACT:
A method for initially positioning the scanning probe of a scanning probe microscope includes the steps of initially using fine position control to reduce the distance between probe and sample and, if the sample surface is not encountered, reversing the direction of the fine position control to an intermediate position and then using a coarse control in predetermined increments to narrow the distance between the probe and the sample. The fine control is again used and if the sample surface is not encountered, the steps are repeated until the surface is encountered so that the scanning operation can commence.

REFERENCES:
patent: 5262643 (1993-11-01), Hammond et al.
patent: 5414690 (1995-05-01), Shido et al.

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