Method of cleaning a coated process chamber component

Details Method of cleaning a coated process chamber component Method of cleaning a coated process chamber component

2005-06-07

2005-06-07

Carrillo, Sharidan (Department: 1746)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S002000, C134S003000, C134S022100, C134S022130, C134S022140, C134S022170, C134S022190, C134S028000, C134S029000, C134S034000, C134S036000, C134S041000, C134S042000

Reexamination Certificate

active

06902628

ABSTRACT:
In a method of cleaning and refurbishing a process chamber component having a metal coating having a surface thereon, the surface of the metal coating is immersed in an acidic solution to remove at least a portion of the process deposits from the surface. Thereafter, the surface of the metal coating is immersed in a basic solution to remove substantially all the metal coating. The component may optionally be bead blasting to roughen a surface of the component, and the metal coating may be re-formed.

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