4. Coating processes
  5. Spray coating utilizing flame or plasma heat
  6. Continuous feed solid coating material

Yongxiang He

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Guard for electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method of cleaning a coated process chamber component

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Method of fabricating a coated process chamber component

Coating processes – Spray coating utilizing flame or plasma heat – Continuous feed solid coating material
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Non-contact protective packaging for surface-sensitive articles

Special receptacle or package – Base with attached clasping-type article retainer – Rigid loop-type retainer
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Reusable ceramic-comprising component which includes a...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2657552

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