Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Treating electrolytic or nonelectrolytic coating after it is...
Reexamination Certificate
2005-03-22
2005-03-22
Koehler, Robert R. (Department: 1775)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Treating electrolytic or nonelectrolytic coating after it is...
C134S031000, C134S042000, C205S799000
Reexamination Certificate
active
06869516
ABSTRACT:
A method for cleaning the electrical contact areas or substrate contact areas of an electrochemical plating contact ring is provided. Embodiments of the method include positioning a substrate on a substrate support member having one or more electrical contacts, chemically plating a metal layer on at least a portion of a surface of the substrate, removing the processed substrate from the support member, and cleaning the one or more electrical contacts with a vapor mixture comprising an alcohol. In another aspect, the method includes spraying the vapor mixture on the electrical contacts while rotating the substrate support member.
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Burkhart Vincent E.
D'Ambra Allen L.
Dixit Girish A.
Herchen Harald
Lubomirsky Dmitry
Applied Materials Inc.
Koehler Robert R.
Moser Patterson & Sheridan
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