4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Vincent E. Burkhart

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Apparatus for wafer detection

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent

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Conductive feed-through for creating a surface electrode...

Electricity: conductors and insulators – Conduits – cables or conductors – Preformed panel circuit arrangement
Reexamination Certificate

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Electrostatic chuck with improved spacing and charge migration r

Machines not elsewhere specified – Material working – abrading – or founding machinery – Element or attachment
Patent

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Electrostatic chuck with improved spacing and charge migration r

Equipment for production – distribution – or transformation of ene – Miscellaneous
Patent

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Electrostatic chuck with improved spacing mask and workpiece det

Machines not elsewhere specified – Material working – abrading – or founding machinery – Element or attachment
Patent

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Profile ID: LFUS-PAI-P-303243

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