Fishing – trapping – and vermin destroying
Patent
1987-02-19
1989-05-30
Hearn, Brian E.
Fishing, trapping, and vermin destroying
148DIG22, 148DIG130, 148DIG169, 156610, 156612, 437 85, 437105, 437228, 437949, B05D 306, H01C 736
Patent
active
048351148
ABSTRACT:
This invention concerns a production method and a processing apparatus for semiconductor devices, as well as an evacuating apparatus used for the processing apparatus. According to this invention, since the evacuation system of pressure-reduction processing apparatus for conducting various wafer processings during production steps of semi-conductor devices is constituted only with oil-free vacuum pump, deleterious oil contaminations or carbonation products of oils produced from oils upon heating are not present in the pressure-reducing processing chamber as compared with conventional pressure-reducing processing apparatus using a vacuum oil pump as an evacuation pump and the production method of semiconductor devices using such apparatus. Accordingly, highly clean evacuated condition can be attained and, in addition, semiconductor devices at high reliability and with no degradation in the electric characteristics can be obtained by using the pressure-reducing processing apparatus having such a highly clean processing chamber.
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Aoki Kouzi
Gyobu Ichiro
Kusaka Tadao
Mase Masahiro
Muramatsu Kimio
Bunch William
Hearn Brian E.
Hitachi , Ltd.
Hitachi Tokyo Electronics Co. Ltd.
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