Pumps
Diverse pumps
Including rotary nonexpansible chamber type
Inventor
active
Method for LPCVD of semiconductors using oil free vacuum pumps
Vacuum system with a secondary gas also connected to the roughin
No associations
LandOfFree
Tadao Kusaka does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Tadao Kusaka, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tadao Kusaka will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-724711