4. Rotary kinetic fluid motors or pumps
  5. Smooth runner surface for working fluid frictional contact

Ichiro Gyobu

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Method for LPCVD of semiconductors using oil free vacuum pumps

Fishing – trapping – and vermin destroying
Patent

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Vacuum pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
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Vacuum system with a secondary gas also connected to the roughin

Pumps – Diverse pumps – Including rotary nonexpansible chamber type
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Vaned diffuser

Rotary kinetic fluid motors or pumps – Working fluid passage or distributing means associated with... – Pump outlet or casing portion expands in downstream direction
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Profile ID: LFUS-PAI-P-324204

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