Method for fabricating an integrated circuit capacitor

Details Method for fabricating an integrated circuit capacitor Method for fabricating an integrated circuit capacitor

2000-04-11

2001-12-25

Smith, Matthew (Department: 2825)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S381000, C438S239000, C438S640000, C438S673000, C438S978000

Reexamination Certificate

active

06333224

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a method of fabricating an integrated circuit capacitor, and more particularly to a method of fabricating a capacitor in a metal-insulator-metal (MIM) structure used in logic or analog circuits of merged dynamic random access memory (DRAM) and logic (MDL) devices.
2. Description of the Prior Art
Semiconductor integrated circuits are generally classified as digital or analog. Digital type integrated circuits (e.g., logic circuits) produce an output according to the state(s) of one or more input signals, whereas analog type integrated circuits (e.g., analog circuits) produce an output according to linearly varied changes in an input signal.
In digital and analog type integrated circuits, data is stored according to the presence or absence of charge accumulated at a capacitor. In order to maintain normal response characteristics, the capacitor should be fabricated in a way that prevent its capacitance from varying with changes in voltage or temperature.
Different from general metallic oxide semiconductor field-effect transistors (MOSFETs) or junction capacitors, MDL capacitors having a polysilicon-insulator-polysilicon (PIP) or metal-insulator-metal (MIM) structure have been proposed because their capacitance does not depend on bias voltage or temperature.
Thin film MIM capacitors, however, do not provide high unit area capacitance in comparison with the PIP capacitors. In addition, MIM capacitors have a lower voltage coefficient of capacitance (VCC), which indicates variation of capacitance according to changes in voltage. They also have a lower temperature coefficient of capacitance (TCC), which indicates variation of capacitance according to changes in temperature. PIP capacitors, for instance, have VCC and TCC values of about 220 parts per million/volt (ppm/V) and 120 parts per million/degree Celsius (ppm/C), respectively, but those of MIM capacitors are about 60 ppm/V and 70 ppm/C, respectively. As a result, MIM capacitors have been used for fabricating precise analog products. In recent years, however, there has been a tendency to use MIM capacitors to make logic and analog circuits.
FIGS. 1
a
through
1
g
are sequential processing diagrams illustrating a widely used conventional method of fabricating MIM capacitors of a logic or analog circuit of an MDL device. The method will be described with reference to accompanying drawings.
As shown in
FIG. 1
a,
a first inter-level insulating layer
12
is formed on a semiconductor substrate
10
having a lower structure (not shown) consisting of transistors, predetermined wires, and the like.
As shown in
FIG. 1
b,
a first conductivity layer
14
of aluminum (Al) is formed on the first inter-level insulating
12
. A capping metal layer of titanium nitride (TiN)
16
is formed to a thickness of about 200 to 600 angstroms (Å) on the first conductivity layer
14
. A photo resist layer (not shown) defining capacitor regions is used as a mask for sequentially etching the capping metal layer
16
and the first conductivity layer
14
, thereby forming a “first conductivity
14
/capping metal layer
16
” deposition structure defining a lower electrode (I).
As shown in
FIG. 1
c,
a second inter-level insulating layer
18
is formed on the first inter-level insulating layer
12
of the lower electrode (I). Then, a chemical mechanical polishing (CMP) or etch-back process is performed to planarize the second inter-level insulating layer
18
. Accordingly, in order to expose predetermined portions of the surface of the first conductivity layer
14
of the lower electrode (I), the second inter-level insulating layer
18
and capping metal layer
16
are selectively etched to form a via hole or cavity (h) in the insulating layer
18
. In this process, a portion of the first conductivity layer
14
is simultaneously etched away to form a recessed portion in the first conductivity layer
14
on the bottom surface of the via hole (h).
As shown in
FIG. 1
d,
a dielectric layer
20
is formed over the second interlevel insulating layer
18
covering the via hole (h) and a thin blocking metal layer
22
is formed by a “titanium/titanium nitride” (“Ti/TiN”) deposition on the dielectric layer
20
.
As shown in
FIG. 1
e,
a second conductivity layer of tungsten (W) is formed on the structure in order to completely fill in the via hole (h). A CMP or etch-back process is performed on the second conductivity layer in order to expose the surface of the blocking metal layer
22
, thereby forming a conductivity plug
24
of W in the via hole (h).
As shown in
FIG. 1
f,
a third conductivity layer
26
of Al alloy is formed on the blocking metal layer
22
having conductivity plug
24
. A photo resist pattern (not shown) defining capacitor regions is used as a mask for sequentially etching the third conductivity layer
26
, blocking metal layer
22
, and the dielectric layer
20
in order to expose predetermined portions of the surface of the second inter-level insulating layer
18
. As a result, a conductivity layer of a predetermined size defines an upper electrode (II), thereby completing the fabrication process.
As a consequence, the dielectric layer
20
lies between the “conductivity plug
24
/conductivity layer
26
” deposition structure of the upper electrode (II) on the top thereof and the “conductivity layer
14
/capping metal layer
16
” deposition structure of the lower electrode (I) on the bottom thereof, which forms the MIM capacitor. As described above, the capping metal layer
16
is made of TiN and both edges where the dielectric layer
20
and the lower electrode (I) are contacted is formed in a sharply angled structure.
However, if an MDL capacitor is fabricated by the aforementioned method, problems may occur. These problems are described below.
In forming the via hole (h), the etching process is performed vertically downward to the capping metal layer
16
of the lower electrode (I). When the etching process is completed, the lower and lateral surfaces of the via hole (h) meet in a perpendicular relationship (e.g., at a right angle) at the bottom of via hole (h).
FIG. 1
g
shows an enlarged partial perspective view of the affected area, including the lower surface of the via hole (h).
Along the lower edge of the via hole (h) in the region of the dielectric layer
20
meeting at an angle, there may also exist a step coverage defect, which is manifested by a thinner dielectric layer
20
compared to other regions of the via hole (h).
Current leakage may occur at the step coverage defect during operation of the device. Even worse, a short circuit may occur between upper and lower electrodes, thereby damaging the capacitor and reducing the yield during production of such semiconductor devices.
In addition, the dielectric layer
20
at the step coverage defect is exposed to higher electric field strengths, i.e., called “concentration of electric field,” which occurs in the operating device thereby lowering reliability of products incorporating the fabricated device. Therefore, there is an urgent demand to solve the aforementioned problems.
SUMMARY OF THE INVENTION
In view of the above, it is a feature of the present invention to provide a method for fabricating a capacitor of a semiconductor integrated circuit by forming a capping metal layer of “Ti/TiN” or “Ti/TiW” depositions which have a higher etching rate than an oxide layer, and by performing an etching process at lower edges of a via hole in a tapered manner in order to equalize or smooth the thickness of the dielectric layer at the bottom of the via hole, thereby preventing reduction in yield due to step coverage defects and improving reliability of devices otherwise subjected to a concentration of electric fields.
In order to accommodate the aforementioned feature, there is provided a method for fabricating a capacitor of a semiconductor integrated circuit comprising the steps of forming a conductivity layer on a semiconductor substrate having a first inter-level insulating layer; formin

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