Method for adjusting capacitance of an on-chip capacitor

Details Method for adjusting capacitance of an on-chip capacitor Method for adjusting capacitance of an on-chip capacitor

2005-03-22

2005-03-22

Nelms, David (Department: 2818)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

C438S787000, C438S171000

Reexamination Certificate

active

06869895

ABSTRACT:
A method and apparatus for adjusting capacitance of an on-chip capacitor uses exposure of a dielectric material of the capacitor to an ion beam comprising ions of at least one material to modify a dielectric constant of the dielectric material.

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