4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

David Erskine

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Method and system for clamping semiconductor wafers

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Test head manipulator

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-52229

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